Computational lithography and mask optimization techniques are at the forefront of enabling the semiconductor industry's continued miniaturisation of integrated circuits. This field encompasses ...
Nvidia's cuLitho software library is being used by TSMC and Synopsys for production chip development. GPU designer Nvidia announced the computational lithography library this time last year, saying ...
Fig. 1 The lithography process. The projection lithography system. The advancement of semiconductor manufacturing is a key driver of electronic device innovations. As Moore’s Law progresses, ...
A distinguished expert in AI-driven computational lithography and advanced metrology, Botlagunta Preethish Nandan has recently come up with a new approach to elevate the precision and efficiency of ...
Researchers review AI-powered inverse lithography, showing how deep learning boosts chip patterning precision and efficiency while facing scaling challenges. Computational lithography optimizes the ...